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Semiconductor Industry Usage High Purity Wf6 Cylinder Gas Tungsten Hexafluoride

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Semiconductor Industry Usage High Purity Wf6 Cylinder Gas Tungsten Hexafluoride

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Brand Name :CMC
Model Number :Wf6
Certification :COA
Place of Origin :China
MOQ :1 Piece
Price :US $ 15/PC
Payment Terms :L/C, T/T
Supply Ability :200t/Year
Delivery Time :15 days
Packaging Details :Cylinder/Tank
Product Name :Tungsten Hexafluoride
Appearance :Colorless
Purity :99.999%
Transport :by Sea
Model No. :Tungsten Hexafluoride
Transport Package :Sea Transportation
Specification :10L 40L 50L
Trademark :CMC
Origin :China
HS Code :2812190091
CAS No. :7783-82-6
Formula :Wf6
EINECS :232-029-1
Constituent :Industrial Pure Air
Grade Standard :Electronic Grade
Chemical Property :Poisonous Gases
Customization :Available | Customized Request
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Product Description

Tungsten hexafluoride (WF6) is a compound composed of tungsten and fluorine. It is a colorless, highly reactive, and volatile gas. Here are some key points about tungsten hexafluoride:

  1. Chemical Formula: WF6
  2. Molecular Weight: 297.84 g/mol
  3. Appearance: WF6 is a colorless gas at room temperature and pressure.
  4. Odor: It does not have a distinct odor.
  5. Reactivity: Tungsten hexafluoride is highly reactive and can react violently with water and moisture. It hydrolyzes rapidly to form tungstic acid (H2WO4) and hydrogen fluoride (HF).
  6. Toxicity: Like other metal halides, tungsten hexafluoride is toxic and should be handled with caution. It can cause severe irritation to the skin, eyes, and respiratory system upon exposure.
  7. Uses: WF6 is primarily used in the semiconductor industry for the deposition of tungsten metal during the manufacturing of integrated circuits (ICs). It is employed in a chemical vapor deposition (CVD) process to create thin films of tungsten. These films are essential for the production of microprocessors and other electronic components.
  8. Safety precautions: Due to its reactivity and toxicity, proper safety measures should be followed when handling tungsten hexafluoride. It should be stored and used in well-ventilated areas with appropriate personal protective equipment (PPE).
Overview

Basic Info.

Model NO. WF6 Transport Package Cylinder
Specification 10L/15kg Trademark CMC
Origin Suzhou, China HS Code 2812190091
Production Capacity 200t/Year
Product Description


Product Spec:

ungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade



The COA of Product:
Test items Units Quality requirements Test results
CF4 ppm <0.5 <0.01
O2 ppm <0.5 <0.01
N2 ppm <1 0.03
CO ppm <0.5 <0.02
CO2 ppm <0.5 <0.01
SiF4 ppm <0.5 <0.1
SF6 ppm <0.5 <0.1
HF ppm <5 0.19
Al ppb ≤10 <0.020
As ppb ≤10 <0.001
B ppb ≤10 <0.005
Ca ppb ≤5 <0.200
Cd ppb ≤2 <0.001
Cr ppb ≤10 <0.020
Fe ppb ≤10 <0.007
K ppb ≤5 <0.100
Mn ppb ≤10 <0.001
Na ppb ≤5 <0.040
Th ppb ≤0.1 <0.001
Ti ppb ≤10 <0.002
Li ppb ≤10 <0.002
U ppb ≤0.05 <0.001
Zn ppb ≤10 <0.005
Si ppb ≤10 <0.100
Pb ppb ≤10 <0.001
P ppb ≤2 <0.300
Mg ppb ≤10 <0.020
Ni ppb ≤20 <0.030
Cu ppb ≤5 <0.005
Mo ppb ≤10 <0.001
Total impurities of other metal ppb ≤500 <0.0010
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Semiconductor Industry Usage High Purity Wf6 Cylinder Gas Tungsten Hexafluoride

Semiconductor Industry Usage High Purity Wf6 Cylinder Gas Tungsten Hexafluoride

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
Semiconductor Industry Usage High Purity Wf6 Cylinder Gas Tungsten Hexafluoride

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